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Low-energy ion irradiation of solid surfaces / Hubert Gnaser
- 作者： Gnaser, Hubert.
- 其他作者：
- 其他題名：
- Springer e-books
- 出版： Berlin ;New York : Springer c1999
- 叢書名： Springer tracts in modern physics ,v. 146
- 主題： Solids--Effect of radiation on. , Ion bombardment.
- ISBN： 9783540650072 (paper)
- URL：
電子書
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讀者標籤：
- 系統號： 005167287 | 機讀編目格式
館藏資訊
The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.
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