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Laser precision microfabrication / edited by Koji Sugioka, Michel Meunier, Alberto Pique
- 其他作者：
- 其他題名：
- Springer eBooks
- 出版： Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg 2010
- 叢書名： Springer series in materials science ,135
- 主題： Lasers--Industrial applications. , Microfabrication. , Physics. , Laser Technology, Photonics. , Nanotechnology.
- ISBN： 9783642105234 (electronic bk.) 、 9783642105227 (paper)
- URL：
電子書
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讀者標籤：
- 系統號： 005176308 | 機讀編目格式
館藏資訊
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.
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