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Nanolithography [electronic resource] : the art of fabricating nanoelectronic and nanophotonic devices and systems / edited by Martin Feldman.
- 其他作者：
- 其他題名：
- Woodhead Publishing series in electronic and optical materials ;
- Woodhead Publishing series in electronic and optical materials ;
- 出版： Oxford : Woodhead Publishing 2014.
- 叢書名： Woodhead publishing series in electronic and optical materials ;no. 42
- 主題： Nanolithography.
- ISBN： 9780857095008 (electronic bk.)
- URL：
click for full text
- 書目註：Includes bibliographical references and index.
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讀者標籤：
- 系統號： 005235918 | 機讀編目格式
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